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Current page 》 Semiconductor Process Equipment
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Semiconductor Process Equipment
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Wet Spray Etcher
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Product Description
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SEMTEK
Etcher (Wet Spray Etcher) is high-precision wet etching process equipment. Wet
etching process often used in semiconductor device fabrication and optical LED
industry fields ...。 In
the semiconductor manufacturing process, wet etching is usually the fastest and
the less cost option. , SEMTEK'S Etcher can be improved the existing shortcoming of the traditional
wet-etching machine, such as: etch uniformity, undercut and WPH.
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SEMTEK Etching can be operated in rotation
and revolution mode with a special spray pattern, to enhance the uniformity. The
Etcher can be used with mixed acid and thermostat
systems to grasp the
process parameters accurately. It also can be etched more wafers simultaneously,unlike
monolithic system. SEMTEK etching feature can improve production capacity,
enhance the symmetry of etching and reduce the consumption of liquid. The most important,
the parameters of etcher can control undercut depth to enhance product
stability. It is suitable for high-tech
industries.
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SEMTEK owns the patent of rotation & revolution spray etching method in China and Taiwan. To honor SEMTEK: THE GOLDEN PEAK AWARD of OUTSTANDING R & D WORKS IN R.O.C.
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Product features
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Controlling undercut's depth-use
parameter trace.
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Etching depth uniformity - <3% (within wafer).
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Increasing productivity - more wafers can be etched simultaneously.
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With patent rotation and revolution principle - get a good symmetry
of etching
line.
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Special spray mode - can reduce the amount of liquid.
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Process Capability - current width of up to 1um.
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Customized tailor made - 12 inches below the size of customer demand.
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Optional mixed acid systems and thermostat systems - can control process
parameters precisely.
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SEMI-S2 certified.
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Product Specification
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Model
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Wafer Size/
Loading Q’ty
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Loading/
unloading
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Overflow tank
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Remarks
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SE-2000
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2"x4pcs
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Manual
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N/A
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It can be used with different liquid used to achieve different process requirements.
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SE-3000
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4"x4pcs
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Manual
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1
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It can be used with different liquid used to achieve different process requirements.
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SE-3600
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6"x4pcs
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Manual
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1
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It can be used with different liquid used to achieve different process requirements.
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SE-4200
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12"x6pcs
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Auto
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Dry-In
Dry-Out
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It can be used with a different solution used, dry dry-out design to achieve different process requirements.
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SE-6500
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8"x4pcs
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Auto
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1
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It can be used with different liquid used to achieve different process requirements.
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Semtek Corporation
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No.536, Jianguo Rd., Yingge Dist., New Taipei City, Taiwan (R.O.C.)
TEL/886-2-26772220 FAX/886-2-26772202
Email:marketing@semtekcorp.com
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